✦ LIBER ✦
Monitoring explosive crystallization phenomenon of amorphous silicon thin films during short pulse duration XeF excimer laser annealing using real-time optical diagnostic measurements
✍ Scribed by Chil-Chyuan Kuo; Wen-Chang Yeh; Jia-Bin Chen; Jeng-Ywan Jeng
- Book ID
- 108289410
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 639 KB
- Volume
- 515
- Category
- Article
- ISSN
- 0040-6090
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