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Monitoring chemical vapour deposition of pyrocarbon by electron spin resonance

✍ Scribed by C Buschhaus; E Dormann; K.J Hüttinger

Book ID: 117537209
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 215 KB
Volume: 114
Category: Article
ISSN: 0379-6779
DOI: 10.1016/s0379-6779(00)00262-9

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