Semiconductor manufacturing process cont
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S. Joe Qin; Gregory Cherry; Richard Good; Jin Wang; Christopher A. Harrison
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Article
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2006
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Elsevier Science
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English
β 323 KB
The semiconductor industry has started the technology transition from 200mm to 300mm wafers to improve manufacturing efficiency and reduce manufacturing cost. These technological changes present a unique opportunity to optimally design the process control systems for the next generation fabs. In thi