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Molybdenum angular sputtering distribution under low energy xenon ion bombardment

✍ Scribed by Oyarzabal, E.; Yu, J. H.; Doerner, R. P.; Tynan, G. R.; Schmid, K.

Book ID: 120609943
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 715 KB
Volume: 100
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2336502

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