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Molecular simulation of freestanding amorphous nickel thin films

โœ Scribed by Dong, T.Q.; Hoang, V.V.; Lauriat, G.


Book ID
120655122
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
837 KB
Volume
545
Category
Article
ISSN
0040-6090

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Thermal conductivity (TC) of thin films will be influenced by boundary if the thickness is close to the mean free path (MFP). In this paper, we calculate the TC of crystalline and amorphous SiO 2 thin films, which are commonly used materials in micro devices and Integrated Circuits, by nonequilibriu