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Molecular Glass Resists as High-Resolution Patterning Materials

✍ Scribed by Anuja De Silva; Nelson M. Felix; Christopher K. Ober

Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 497 KB
Volume: 20
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.200800763

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