✦ LIBER ✦
Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon
✍ Scribed by H.Y. Chan; K. Nordlund; H.-J.L. Gossmann; M. Harris; N.J. Montgomery; C.P.A. Mulcahy; S. Biswas; M.P. Srinivasan; F. Benistant; C.M. Ng; Lap Chan
- Book ID
- 111713853
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 274 KB
- Volume
- 504
- Category
- Article
- ISSN
- 0040-6090
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