✦ LIBER ✦
Molecular dynamics study on Ar ion bombardment effects in amorphous SiO[sub 2] deposition processes
✍ Scribed by Taguchi, Masafumi; Hamaguchi, Satoshi
- Book ID
- 126454889
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 1002 KB
- Volume
- 100
- Category
- Article
- ISSN
- 0021-8979
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