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Molecular dynamics study of the fluence dependence of Si sputtering by 1 keV Ar+ ions

✍ Scribed by J.E. Rubio; L.A. Marqués; L. Pelaz; M. Jaraíz; J. Barbolla

Book ID
113287183
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
426 KB
Volume
112
Category
Article
ISSN
0168-583X

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