✦ LIBER ✦
Molecular dynamics study of diffusion and atomic configuration in layered structures for Al circuit interconnects
✍ Scribed by T. Iwasaki
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 289 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0178-7675
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