Simulation of molecular dynamics associa
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Y.Y. Cheng; C.C. Lee
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Article
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2008
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Elsevier Science
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English
โ 544 KB
Rough surface formation in thin films during annealing occurs with several materials. Increased roughness of an aluminum (Al) thin film surface can lead to electrical shorts, which are a significant problem for interconnections in liquid-crystal displays. Surface roughness can be decreased by adding