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Molecular dynamics simulation of nano-scale Fe–Al thin film growth

✍ Scribed by Chan-Yeup Chung; Yong-Chae Chung


Book ID
113789386
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
391 KB
Volume
60
Category
Article
ISSN
0167-577X

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📜 SIMILAR VOLUMES


Simulation of molecular dynamics associa
✍ Y.Y. Cheng; C.C. Lee 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 544 KB

Rough surface formation in thin films during annealing occurs with several materials. Increased roughness of an aluminum (Al) thin film surface can lead to electrical shorts, which are a significant problem for interconnections in liquid-crystal displays. Surface roughness can be decreased by adding