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Molecular dynamics simulation comparison of atomic scale intermixing at the amorphous Al2O3/semiconductor interface for a-Al2O3/Ge, a-Al2O3/InGaAs, and a-Al2O3/InAlAs/InGaAs

✍ Scribed by Evgueni A. Chagarov; Andrew C. Kummel

Book ID
108280801
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
776 KB
Volume
603
Category
Article
ISSN
0039-6028

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