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Molecular Dynamics Geometry Simulations of the SiNxOy/Si Interfaces

✍ Scribed by K. Plucinski; I.V. Kityk; M. Makowska-Janusik

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 233 KB
Volume: 35
Category: Article
ISSN: 0232-1300
DOI: 10.1002/1521-4079(200011)35:11/12<1305::aid-crat1305>3.0.co;2-t

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