✦ LIBER ✦
Molecular dynamics and quasidynamics simulations of low-energy ion/surface interactions leading to decreased epitaxial temperatures and increased dopant incorporation probabilities during Si MBE
✍ Scribed by M. Kitabatake; P. Fons; J.E. Greene
- Book ID
- 107791891
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 449 KB
- Volume
- 111
- Category
- Article
- ISSN
- 0022-0248
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