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Molecular dynamic simulations of atom–cluster collision processes

✍ Scribed by Napari, Ismo; Vehkamäki, Hanna; Laasonen, Kari


Book ID
121728138
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
237 KB
Volume
120
Category
Article
ISSN
0021-9606

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A molecular dynamics simulation of clust
✍ Yasuhiro Hada 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 224 KB

Cluster ion implantation is a useful technique for manufacturing ultra-shallow-junction. In order to investigate the depth and lateral distribution as well as cluster dissociation, we performed a molecular dynamics simulation that injects 200-500 eV/atom boron cluster into single crystal silicon. Th