✦ LIBER ✦
Molecular beam epitaxy synthesis of Si1−yCy and Si1−x−yGexCy alloys and Ge islands using an electron cyclotron resonance argon/methane plasma
✍ Scribed by J.-M. Baribeau; D.J. Lockwood; J. Balle; S.J. Rolfe; G.I. Sproule; S. Moisa
- Book ID
- 108388401
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 739 KB
- Volume
- 410
- Category
- Article
- ISSN
- 0040-6090
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