✦ LIBER ✦
Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon
✍ Scribed by Zhao, Yi; Toyama, Masahiro; Kita, Koji; Kyuno, Kentaro; Toriumi, Akira
- Book ID
- 120423529
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 385 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0003-6951
No coin nor oath required. For personal study only.