✦ LIBER ✦
MOEMS translatory actuator characterisation, position encoding and closed-loop control
✍ Scribed by M. Lenzhofer; A. Tortschanoff; A. Frank; T. Sandner; H. Schenk; M. Kraft; A. Kenda
- Book ID
- 106185896
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 510 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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