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Modulation Ellipsometry - A New Technique for the Characterization of Semiconductor Materials and Complex Semiconductor Structures

✍ Scribed by Zettler, J. Th. ;Dittrich, Th. ;Schrottke, L.

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
190 KB
Volume
119
Category
Article
ISSN
0031-8965

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