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Modified elemental sensitivity factors for auger electron spectroscopy

✍ Scribed by Richard Payling


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
308 KB
Volume
36
Category
Article
ISSN
0368-2048

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Ion bombardment usually leads to a change in the equilibrium sputtered surface composition of compound semiconductors. This change is matrix dependent. To compensate for this sputter-induced e †ect in quantitative AES, a sputter yield correction factor is usually employed. This factor is based on th