Modification of the near-surface layer ofn-Si by hydrogen ions in a high-voltage pulsed beam discharge

✍ Scribed by V. P. Demkin; S. V. Mel’nichuk; B. S. Semukhin

• Book ID: 110141847
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2005
• Tongue: English
• Weight: 89 KB
• Volume: 31
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1920376