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Modification of the mass weighing in A3B5 automated Czochralski crystal growth techniques

✍ Scribed by S. N. Rossolenko


Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
242 KB
Volume
44
Category
Article
ISSN
0232-1300

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✦ Synopsis


Abstract

Modification of weight signal of LEC, VCZ crystal growth processes based on the knowledge of the weight signal in the past during the pulling process was considered. This modification is necessary for development and improvement of the direct automated weight control in these techniques of crystal growth. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)