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Modification of the c-axis orientation of hexagonal cadmium sulfide films by a new technique of evaporation by reflection

✍ Scribed by G. Le Floch


Book ID
107856000
Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
771 KB
Volume
15
Category
Article
ISSN
0038-1101

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Thin BaTiO 3 films were deposited on thin TiN film covered Si wafers by ion beam assisted deposition comprising of two electron beam evaporators for evaporating Ti and BaCO 3 and an electron cyclotron resonance ion source for ionizing O 2 . Films deposited using 25 eV oxygen ion beams had many small