Conducting layers on KrF excimer-laser-irradiated polyimide film surfaces were investigated by XPS, SEM and Fourier transform infrared (FTIR)-Raman spectroscopy. Analysis of polyimide residue after laser irradiation provided valuable insight into the nature of the formation of conducting layers. The
Modification of surface films on metallic substrates by excimer laser irradiation
β Scribed by H.W. Bergmann; E. Schubert; K.J. Schmatjko; J. Dembowski
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 314 KB
- Volume
- 174
- Category
- Article
- ISSN
- 0040-6090
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