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Modification of surface energy, dry etching, and organic film removal using atmospheric-pressure pulsed-corona plasma

✍ Scribed by Yamamoto, T.; Newsome, J.R.; Ensor, D.S.


Book ID
117863763
Publisher
IEEE
Year
1995
Tongue
English
Weight
671 KB
Volume
31
Category
Article
ISSN
0093-9994

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