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Modification of amorphous bright chromium deposited (ABCD) films by nitrogen ion implantation

✍ Scribed by Hermann Ferber; Gar B. Hoflund; Charles K. Mount; Shigeo Hoshino


Book ID
113281974
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
565 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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πŸ“œ SIMILAR VOLUMES


Novel chromium layers formed by nitrogen
✍ Hermann Ferber; Gar B. Hoflund; Charles K. Mount; Shigeo Hoshino πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 506 KB

## Abstract Nitrogen‐ion implantation of conventional Cr and amorphous bright chromium‐deposited (ABCD) films which were preannealed at various temperatures, has been carried out in order to determine the effect of implantation on the hardness of the Cr layers. The implantation was carried out usin