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Modification and detection of domains on ferroelectric PZT films by scanning force microscopy

โœ Scribed by K. Franke; J. Besold; W. Haessler; C. Seegebarth


Book ID
118366982
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
424 KB
Volume
302
Category
Article
ISSN
0039-6028

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In this study, the radio frequency (RF) magnetron sputtering process is used to generate a PZT ferroelectric thin film on a silicon substrate. The surface characteristics of this lead zirconate titanate film Pb(Zr Ti )O is then investigated by means of an atomic force microscopy (AFM) method. The r