Modelling the sidewall masked oxidation process using the boundary element method : M. J. Needs, K. Board and C. Taylor. Microelectron. J. 22(7–8), 33 (1991)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 115 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90719-2