✦ LIBER ✦
Modelling of epitaxial growth rate of silicon by vapour phase epitaxy : A. N. Daw, D. K. Pal and M. K. Kowar. Microelectron. J.21(5), 29 (1990)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 129 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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