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Modelling of discharge in a high-flow microwave plasma source (MPS)

✍ Scribed by Nowakowska, Helena; Jasiński, Mariusz; Mizeraczyk, Jerzy


Book ID
120550024
Publisher
Springer
Year
2013
Tongue
English
Weight
743 KB
Volume
67
Category
Article
ISSN
1434-6060

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