✦ LIBER ✦
Modelling of deep silicon etching in multicomponent plasma : M. K. Abachev, Yu P. Baryshev, V. P. Lukichev and A. A. Orlikovsky. Vacuum43(5–7), 565 (1992)
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 115 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.