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Modelling considerations for electrostatic forces in electrostatic microactuators

✍ Scribed by Richard H. Price; John E. Wood; Stephen C. Jacobsen

Book ID: 107927740
Publisher: Elsevier Science
Year: 1989
Weight: 793 KB
Volume: 20
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(89)87108-2

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