Modelling and analysis of multiple cluster tools system with random failures using coloured Petri net

✍ Scribed by Tauseef Aized

• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 222 KB
• Volume: 50
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-010-2592-8