Modeling the influence of surface effect and molecular force on pull-in voltage of rotational nano–micro mirror using 2-DOF model

✍ Scribed by Beni, Y. Tadi; Koochi, A.; Kazemi, A.S.; Abadyan, M.

• Book ID: 120842924
• Publisher: NRC Research Press
• Year: 2012
• Tongue: English
• Weight: 689 KB
• Volume: 90
• Category: Article
• ISSN: 0008-4204
• DOI: 10.1139/p2012-092