✦ LIBER ✦
Modeling of ultra thin resist film structure after spin-coating and post-application bake
✍ Scribed by J.H. Tortai
- Book ID
- 104050187
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 192 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.