✦ LIBER ✦
Modeling of through-focus aerial image with aberration and imaginary mask edge effects in optical lithography simulation
✍ Scribed by Yamazoe, Kenji ;Neureuther, Andrew R.
- Book ID
- 115356741
- Publisher
- The Optical Society
- Year
- 2011
- Tongue
- English
- Weight
- 779 KB
- Volume
- 50
- Category
- Article
- ISSN
- 1559-128X
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