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Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section

✍ Scribed by A. L. Herrera-May; L. A. Aguilera-Cortés; P. J. García-Ramírez; H. Plascencia-Mora; M. Torres-Cisneros

Book ID: 106185992
Publisher: Springer-Verlag
Year: 2010
Tongue: English
Weight: 492 KB
Volume: 16
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-010-1134-5

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