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Modeling of Silicon CVD into Agglomerates of Sub-micrometer-size Particles in a Fluidized Bed

✍ Scribed by Nicolas Reuge; Brigitte Caussat


Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
240 KB
Volume
17
Category
Article
ISSN
0948-1907

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## Abstract The behavior of SiO~2~ nanoparticles and the effects of operating conditions on nanoparticle agglomerate sizes have been investigated under conditions created in a vibro‐fluidized bed (VFB). The experimental results reveal that the vibrations imposed in the bed can suppress slugging and