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Modeling of Silicon Carbide ECR Etching by Feed-Forward Neural Network and Its Physical Interpretations

✍ Scribed by Jing-Hua Xia; Rusli; Kumta, A.


Book ID
114667282
Publisher
IEEE
Year
2010
Tongue
English
Weight
663 KB
Volume
38
Category
Article
ISSN
0093-3813

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