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Modeling of Reaction Pathways of GaN Growth by Metalorganic Vapor-Phase Epitaxy Using TMGa/NH 3 /H 2 System: A Computational Fluid Dynamics Simulation Study

✍ Scribed by Hirako, Akira; Kusakabe, Kazuhide; Ohkawa, Kazuhiro


Book ID
121476272
Publisher
Institute of Pure and Applied Physics
Year
2005
Tongue
English
Weight
152 KB
Volume
44
Category
Article
ISSN
0021-4922

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