Modeling of Particle Removal using Non-contact Brush Scrubbing in Post-CMP Cleaning Processes

✍ Scribed by Chein, Reiyu; Liao, Wenyuan

• Book ID: 126992355
• Publisher: Taylor and Francis Group
• Year: 2006
• Tongue: English
• Weight: 333 KB
• Volume: 82
• Category: Article
• ISSN: 0021-8464
• DOI: 10.1080/00218460600766566