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Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo
✍ Scribed by Jegert, Gunther; Kersch, Alfred; Weinreich, Wenke; SchroÌder, Uwe; Lugli, Paolo
- Book ID
- 120775373
- Publisher
- American Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 374 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0003-6951
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