Modeling of Layout Aware Line-Edge Roughness and Poly Optimization for Leakage Minimization

✍ Scribed by Yongchan Ban; Pan, D.Z.

• Book ID: 117880900
• Publisher: Institute of Electrical and Electronics Engineers
• Year: 2011
• Tongue: English
• Weight: 926 KB
• Volume: 1
• Category: Article
• ISSN: 2156-3357
• DOI: 10.1109/jetcas.2011.2159286