Modeling of gas-phase processes in laser-induced chemical vapor deposition from Cr(CO)6with an excimer laser

✍ Scribed by N. Okada; Y. Katsumura; K. Ishigure

• Publisher: Springer
• Year: 1993
• Tongue: English
• Weight: 986 KB
• Volume: 56
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00517681