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Modeling of amorphous pocket formation in silicon by numerical solution of the heat transport equation

✍ Scribed by D. Kovač; G. Otto; G. Hobler

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 259 KB
Volume: 228
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.10.048

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