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Modeling magnetic fields of magnetron sputtering systems

✍ Scribed by M.S. Wong; W.D. Sproul; S.L. Rohde

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 805 KB
Volume: 49
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(91)90042-u

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