Modeling fluid velocity response for wafer scanning in immersion lithography

✍ Scribed by Hui Chen; Xin Fu; Jun Zou; Huayong Yang; Xiaodong Ruan; Guofang Gong

• Book ID: 104052538
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 375 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.062