𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Modeling and simulation of a silicon beam resonator attached to a square diaphragm

✍ Scribed by Fan, Shangchun ;Liu, Guangyu ;Lee, Man Hyung ;Yoon, Kang Sup

Publisher
Springer-Verlag
Year
1998
Tongue
Korean
Weight
481 KB
Volume
12
Category
Article
ISSN
1226-4865

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

THE 1:1 INTERNALLY RESONANT RESPONSE OF
THE 1:1 INTERNALLY RESONANT RESPONSE OF A CANTILEVER BEAM ATTACHED TO A ROTATING BODY
✍ K.D. Murphy; C.L. Lee πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 270 KB

Modal coupling in the dynamics of a cantilever beam attached to a rotating body is investigated using a coupled, non-linear three-degree-of-freedom model which includes the effects of centrifugal stiffening. The near-resonant response of two lateral modes (one in-plane and one out-of-plane as define

Simulations and experiments of hardening
Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator
✍ R.M.C. Mestrom; R.H.B. Fey; K.L. Phan; H. Nijmeijer πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 536 KB

By means of a combined analytical-numerical and experimental approach, the nonlinear dynamic behavior of a clamped-clamped beam MEMS resonator has been investigated. A good qualitative correspondence between simulations and experiments has been obtained. First-principles based multiphysics modeling

Resonance frequency dependence on out-of
Resonance frequency dependence on out-of-plane forces for square silicon membranes: Applications to a MEMS gradiometer
✍ I. Lucas; R.P. del Real; M.D. Michelena; V. de Manuel; M. Duch; J. Esteve; J.A. πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 853 KB

The dynamic properties of membranes have been object of many researches since they can be used as sensor heads in different devices. Some methods have been proposed to solve the problem of determining the resonance frequencies and their dependence on the stress caused by forces applied on the membra