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Modeling and simulation of a chemically amplified DUV resist using the effective acid concept

✍ Scribed by M. Weiß; H. Binder; R. Schwalm

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 477 KB
Volume: 27
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)00134-g

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